The aim of this study was to tailor the deposition parameters of magnetron sputtering to synthetize tantalum oxide (TaxOy) films onto commercially pure titanium (cpTi) surface. The structural and optical properties, morphology, roughness, elemental chemical composition and surface energy were assessed. The impact of TaxOy films on initial Streptococcus sanguinis adhesion was investigated. The morphology and spreading of pre-osteoblastic (MC3T3-E1) cells on a crystalline tantalum oxide film were evaluated. TaxOy films with estimated thickness of 600 nm and different structures (amorphous or crystalline) were produced depending on the various oxygen flow rates and parameters used. X-ray diffraction analysis revealed that the 8 O-2 sccm (600 degrees C/400 W) group showed crystallization corresponding to the beta-TaxO5 phase. Optical analysis showed that the 4 O-2 sccm (200 degrees C 300 W) to 8 O-2 sccm (600 degrees C 300 W) groups and 10 O-2 sccm (200 degrees C 300 W) group presented regular and large-amplitude interference oscillations, suggesting high optical homogeneity of the films. The crystalline beta-TaxO5 coating showed higher roughness and surface energy values than the other groups (P < .05) and was biocompatible. Compared with cpTi, the amorphous and crystalline tantalum oxide films did not increase bacterial adhesion (P > .05). By tailoring the deposition parameters, we synthetized a crystalline beta-TaxO5 coating that improved titanium surface properties and positively affected cell spreading and morphology, making it a promising surface treatment for titanium-based implants Ver menos