Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/99815
Type: Artigo de periódico
Title: From Photocorrosion To Photoelectrochemical Etching
Author: Decker F.
Soltz D.A.
Cescato L.
Abstract: A short report is given on the technique of photoelectrochemical etching. The basic principles and the existing literature on photoetching are reviewed. It appears that this technique has a number of applications in semiconductor characterization, in optics, in electronic devices fabrication and in solar energy conversion devices. Special attention is devoted to the photoelectrochemical etching processes of III-V compound semiconductors and experimental results of the etching of InP are reported. The micro-reliefs obtained on InP by photoetching are described and possible applications are discussed. © 1992.
Editor: 
Rights: fechado
Identifier DOI: 10.1016/0013-4686(93)80013-P
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-0027146737&partnerID=40&md5=61ac96e44d6a28b4e1b56ac58dfa636d
Date Issue: 1993
Appears in Collections:Unicamp - Artigos e Outros Documentos

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