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Type: Artigo de periódico
Title: Infrared Analysis Of A-ge1-xnx:h
Author: Marques F.C.
Chambouleyron I.
Evangelisti F.
Abstract: Infrared analysis of non-stoichiometric hydrogenated germanium-nitrogen alloys (a-Ge1-xNx:H) is presented. The films were prepared by rf glow discharge and rf sputtering using various gases. The infrared spectra show different features depending on the deposition method and conditions. In the samples prepared by rf sputtering in an Ar + NH3 atmosphere, the presence of NH2 bonding groups were observed. The absorption band for the NH2 bending vibration is at 1435 cm-1. The stretching mode is composed of at least four bands in the 2800 to 3600 cm-1 range. The same samples, in addition, have an absorption band at 545 cm-1 which we attributed to the GeNH2 vibrations. The samples prepared by glow discharge at a substrate temperature of 230°C in a GeH4 + NH3 atmosphere do not contain NH2 absorption bands. © 1989.
Rights: fechado
Identifier DOI: 10.1016/0022-3093(89)90650-9
Date Issue: 1989
Appears in Collections:Unicamp - Artigos e Outros Documentos

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