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Type: Artigo de periódico
Title: Temperature Effects On The Optical Properties Of Amorphous Hydrogenated Silicon Nitrogen Alloys Prepared By Rf Sputtering
Author: Berger J.M.
Ance C.
de Chelle F.
Ferraton J.P.
Donnadieu A.
Cisneros J.I.
Dias da Silva J.H.
Abstract: Amorphous hydrogenated silicon nitrogen alloys with variable nitrogen concentration were prepared by the reactive RF sputtering method. The optical gap shows a drastic increase at an atomic N/Si ratio near unity. The variations of the optical gap and static refractive index were measured at different temperatures and after several heat treatments. Irreversible effects related to hydrogen evolution and changes in the microscopic structure were observed, the importance of which depends on the nitrogen concentration. © 1987 Elsevier Science Publishers B.V. (North-Holland Physics Publishing Division).
Rights: fechado
Identifier DOI: 10.1016/S0022-3093(87)80070-4
Date Issue: 1987
Appears in Collections:Unicamp - Artigos e Outros Documentos

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