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Type: Artigo de periódico
Title: Columnar Cvd Diamond Growth Structure On Irregular Surface Substrates
Author: Trava-Airoldi V.J.
Corat E.J.
Pena A.F.V.
Leite N.F.
Baranauskas V.
Salvadori M.C.
Abstract: Columnar grain structure is always observed in CVD-diamond growth and is an important parameter to identify the morphology of thin and thick films. Structure defects, aspects of onset nucleation and film growth mechanisms can also be related to columnar growth. In this work we focused our attention on the columnar structure of CVD-diamond grown on irregular surfaces. We observed that there is a relationship among curvature radius of the substrate surface, the spread of the column volume and the growth rate of the diamond film. Growth rates on spherical surfaces of around 0.5 mm curvature radius have been observed to be up to three times bigger than the growth rates on planar surfaces. Also, the grain size distribution on planar and on the corner surfaces as a function of the growth rate has been studied. Characterization with scanning electron microscopy (SEM) and Raman scattering spectroscopy (RSS) has been performed. © 1995.
Rights: fechado
Identifier DOI: 10.1016/0925-9635(95)00308-8
Date Issue: 1995
Appears in Collections:Unicamp - Artigos e Outros Documentos

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