Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/95807
Type: Artigo de periódico
Title: Optical And Electrical Characteristics Of Dlc Film Growth At Low Temperature Pecvd
Author: de Amorim H.A.
Alves M.A.R.
Braga E.S.
Frejlich J.
Cescato L.
Abstract: DLC films deposited by PECVD of CH4 at room temperature were characterized by optical and electrical measurements. The films presented good smoothness and uniformity for large areas and were transparent for I.R. radiation and had high electrical resistivity. The viability of such films to produce MIS diodes was demonstrated.
Editor: ABEQ, Sao Paulo, Brazil
Rights: aberto
Identifier DOI: 
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-0029516957&partnerID=40&md5=6863c7018a5d066fc17421c237b662ca
Date Issue: 1995
Appears in Collections:Unicamp - Artigos e Outros Documentos

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