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Type: Artigo de evento
Title: Microstructural Investigation Of Porous Silicon Depth Profile By Direct Surface Force Microscopy
Author: Chang D.C.
Baranauskas V.
Doi I.
Prohaska T.
Abstract: We propose a method for studies in depth profile of porous silicon (PS) using atomic force microscopy (AFM) to remove PS layers from the surface. The abrasion were made applying forces between 10-11 to 10-13 N with the AFM liquid cell measuring method. These range of forces is enough to remove very thin PS layers of the surface at each scan the equipment makes. With this method we can make studies and see the PS differences in depth profile made by different process or different manufacturing conditions.
Editor: Materials Research Society, Pittsburgh, PA, United States
Rights: fechado
Identifier DOI: 
Date Issue: 1996
Appears in Collections:Unicamp - Artigos e Outros Documentos

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