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|Type:||Artigo de evento|
|Title:||Microstructural Investigation Of Porous Silicon Depth Profile By Direct Surface Force Microscopy|
|Abstract:||We propose a method for studies in depth profile of porous silicon (PS) using atomic force microscopy (AFM) to remove PS layers from the surface. The abrasion were made applying forces between 10-11 to 10-13 N with the AFM liquid cell measuring method. These range of forces is enough to remove very thin PS layers of the surface at each scan the equipment makes. With this method we can make studies and see the PS differences in depth profile made by different process or different manufacturing conditions.|
|Editor:||Materials Research Society, Pittsburgh, PA, United States|
|Appears in Collections:||Unicamp - Artigos e Outros Documentos|
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