Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/94740
Type: Artigo de evento
Title: Use Of A Langmuir Probe For Ecr Plasma Characterization
Author: Daltrini A.M.
Moshkalyov S.A.
Ramos A.C.S.
Swart J.W.
Abstract: A Langmuir electric probe which can be used in single, double and triple probe configurations, was installed in a high density electron cyclotron resonance (ECR) plasma reactor. The first results for electron temperature and density for different gases (Ar and Ar/N2), pressures and microwave power are presented.
Editor: 
Rights: fechado
Identifier DOI: 
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-17044361859&partnerID=40&md5=8a41ceed365e8e1df3707ef04fd2dce6
Date Issue: 2004
Appears in Collections:Unicamp - Artigos e Outros Documentos

Files in This Item:
There are no files associated with this item.


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.