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Type: Artigo de evento
Title: Use Of A Langmuir Probe For Ecr Plasma Characterization
Author: Daltrini A.M.
Moshkalyov S.A.
Ramos A.C.S.
Swart J.W.
Abstract: A Langmuir electric probe which can be used in single, double and triple probe configurations, was installed in a high density electron cyclotron resonance (ECR) plasma reactor. The first results for electron temperature and density for different gases (Ar and Ar/N2), pressures and microwave power are presented.
Rights: fechado
Identifier DOI: 
Date Issue: 2004
Appears in Collections:Unicamp - Artigos e Outros Documentos

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