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Type: Artigo de evento
Title: Comparative Studies Of The Feed Gas Composition Effects On The Characteristics Of Dlc Films Deposited By Magnetron Sputtering
Author: Libardi J.
Grigorov K.
Massi M.
Otani C.
Ravagnani S.P.
Maciel H.S.
Guerino M.
Ocampo J.M.J.
Abstract: Mixtures of acetylene/argon and methane/argon with different volume percents of hydrocarbon were used as the precursor gas to grow DLC films, keeping constant the other process parameters. The substrates used were p-type (100) silicon wafers. The films were characterized by Raman spectroscopy, nanoindentation, atomic force microscopy (AFM) and by a profilometer. In order to grow DLC films with special properties that could make this material an alternative candidate for applications in micro-electromechanical systems (MEMS) production, a comparative analysis focused on the influence of the hydrocarbon precursor gas mixture on the mechanical and chemical properties of the DLC films is reported. © 2004 Elsevier B.V. All rights reserved.
Rights: fechado
Identifier DOI: 10.1016/j.tsf.2003.12.131
Date Issue: 2004
Appears in Collections:Unicamp - Artigos e Outros Documentos

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