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Type: Artigo de evento
Title: Inductively Coupled Plasma Test Reactor Development And Plasma Measurements
Author: Monteiro M.J.R.
Kostryukov A.
Daltrini A.M.
Moshkalyov S.A.
Machida M.
Besseler E.
Abstract: In this work, the design of an inductively coupled plasma test reactor is presented. The reactor is constructed with the goals to allow development of high density plasma diagnostics (Langmuir probe and optical emission spectroscopy) and optimization of the main plasma parameters, with the main emphasis on the radial uniformity of the plasma. A Faraday shield was installed to reduce the capacitive coupling to the plasma, resulting in a considerable improvement of the plasma uniformity and Langmuir probe measurements accuracy.
Rights: fechado
Identifier DOI: 
Date Issue: 2005
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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