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Type: Artigo de evento
Title: Langmuir Probe And Optical Emission Spectroscopy Study Of An Inductively Coupled Plasma Source
Author: Daltrini A.M.
Monteiro M.J.R.
Kostryukov A.
Moshkalyov S.A.
Machida M.
Besseler E.
Abstract: The plasma produced in an ICP test reactor was studied by Langmuir probe and spectroscopy techniques. Radial profiles of the electron density and temperature were determined for different gas pressures, RF powers and gas compositions. Whereas Ar plasmas showed higher electron density, nitrogen containing plasmas present higher uniformity and higher temperature. The influence of Ar metastables is discussed by the comparison of Ar emission lines.
Rights: fechado
Identifier DOI: 
Date Issue: 2005
Appears in Collections:Unicamp - Artigos e Outros Documentos

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