Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/93915
Type: Artigo de evento
Title: Study Of Acoustic Properties Of Tio2 Films With The Help Of Surface Acoustic Wave Resonators
Author: Alcantara G.P.
Balashov S.M.
Carola A.
Kim C.-U.
Abstract: The one-port SAW resonator coated with TiO2 film of different thickness is used to study experimentally the effect of SAW attenuation on the border between the crystal and the film. It is shown that SAW attenuation takes place in the film in thin layer of about 500 angstroms thickness. Thickness dependence of frequency shift and Q-factor of SAW oscillator and resonator are presented. Mass sensitivity of SAW resonator to TiO2 film was measured to be 2.7 kHz/Å.
Editor: 
Rights: fechado
Identifier DOI: 
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-31744442997&partnerID=40&md5=07fe9f2abd068c2967bdf24e21695bbc
Date Issue: 2005
Appears in Collections:Unicamp - Artigos e Outros Documentos

Files in This Item:
There are no files associated with this item.


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.