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Type: Artigo de evento
Title: Thermoreflectance Measurements On Test Microelectronic Devices At Several Probe Wavelengths: Comparison Between Cod And Focused Laser Techniques
Author: De Freitas L.R.
Mansanares A.M.
Da Silva E.G.
Pimentel M.C.B.
Finco S.
Tessier G.
Fournier D.
Abstract: In this paper we present thermoreflectance measurements on polycrystalline silicon conducting tracks for several wavelengths of the probe beam. Two distinct experimental setup were employed, namely, the CCD camera setup and the focused laser setup. It is shown that the thermoreflectance signal behavior is closely related to the derivative of the optical reflectance with respect to the wavelength. © EDP Sciences.
Rights: aberto
Identifier DOI: 10.1051/jp4:2005125028
Date Issue: 2005
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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