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Type: Artigo de periódico
Title: Fabrication And Characterization Of Polymeric Optical By Plasmafluorination Process
Author: Giacon V.M.
Da Silva Padilha G.
Bartoli J.R.
Abstract: The fabrication and characterization of planar polymeric waveguides produced on silicon substrate foroptical devices is reported. The cladding was made of a fluorinated polymer by CHF3plasma polymeriza-tion and the core was a PMMA film prepared by spin coating. The polymeric waveguides with differentwidths (from 10 to 100 μm) were patterned by UV photolithography. The plasma fluorinated opticalfilms were characterized by ellipsometry, metricon prism coupler, interferometer and FTIR-ATR. Thewaveguide optical characterization was done by coupling a laser beam, fiber-to-fiber coupling method,using a multimode optical fiber.
Editor: Urban und Fischer Verlag Jena
Rights: fechado
Identifier DOI: 10.1016/j.ijleo.2014.08.152
Date Issue: 2015
Appears in Collections:Unicamp - Artigos e Outros Documentos

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