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dc.contributor.CRUESPUniversidade Estadual de Campinaspt_BR
dc.typeArtigo de periódicopt_BR
dc.titleStructural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVDpt_BR
dc.contributor.authorDurrant, SFpt_BR
dc.contributor.authorCastro, SGCpt_BR
dc.contributor.authorBolivarMarinez, LEpt_BR
dc.contributor.authorGalvao, DSpt_BR
dc.contributor.authordeMoraes, MABpt_BR
unicamp.authorUNIV ESTADUAL CAMPINAS,INST FIS GLEB WATAGHIN,GRP FIS SUPERFICIES,BR-13083970 CAMPINAS,SP,BRAZIL UNIV ESTADUAL CAMPINAS,INST FIS GLEB WATAGHIN,GRP SOLIDOS ORGAN & NOVAS MAT,BR-13083970 CAMPINAS,SP,BRAZILpt_BR
dc.subjectoptical propertiespt_BR
dc.subjectoptical spectroscopypt_BR
dc.subjectplasma processing and depositionpt_BR
dc.subjectx-ray photoelectron spectroscopypt_BR
dc.subject.wosEmission-spectroscopypt_BR
dc.subject.wosElectronic-structurept_BR
dc.subject.wosRf Dischargespt_BR
dc.subject.wosDepositionpt_BR
dc.subject.wosMixturespt_BR
dc.subject.wosMechanismspt_BR
dc.subject.wosNitrogenpt_BR
dc.subject.wosPlasmaspt_BR
dc.subject.wosDensitypt_BR
dc.subject.wosBenzenept_BR
dc.description.abstractFluorinated films were deposited from radiofrequency discharges of toluene/trifluorotoluene and toluene/sulfur hexafluoride mixtures. Actinometric optical emission spectroscopy was used to determine trends in the concentrations of the plasma species H, CH, and F as a function of the partial pressure of trifluorotoluene or sulfur hexafluoride present (expressed as a percentage of the total chamber pressure) designated R-T and R-s, respectively. Transmission infrared spectrophotometry and electron spectroscopy for chemical analysis revealed that the films contain various fluorine-containing functionalities and that the degree of fluorination increases as R-T or R-s is increased. Ultraviolet-visible spectrophotometry of films deposited at various values of R-T and of R-s allowed the determination of the absorption coefficients ct of the films. From plots of ct as a function of photon energy it was possible to calculate the optical gap (E-04). An intriguing result was a decline and subsequent rise in E-04 as R-s was increased. Molecular modelling using ZINDO/PM3 calculations provided a semi-quantitative explanation of the dependence of E-04 on R-s. (C) 1997 Elsevier Science S.A.pt
dc.relation.ispartofThin Solid Filmspt_BR
dc.relation.ispartofabbreviationThin Solid Filmspt_BR
dc.publisher.cityLausannept_BR
dc.publisher.countrySuíçapt_BR
dc.publisherElsevier Science Sa Lausannept_BR
dc.date.issued1997pt_BR
dc.date.monthofcirculation11140pt_BR
dc.identifier.citationThin Solid Films. Elsevier Science Sa Lausanne, v. 304, n. 41671, n. 149, n. 156, 1997.pt_BR
dc.language.isoenpt_BR
dc.description.volume304pt_BR
dc.description.issuenumber41671pt_BR
dc.description.firstpage149pt_BR
dc.description.lastpage156pt_BR
dc.rightsfechadopt_BR
dc.rights.licensehttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policypt_BR
dc.sourceWeb of Sciencept_BR
dc.identifier.issn0040-6090pt_BR
dc.identifier.wosidWOS:A1997XV58200023pt_BR
dc.identifier.doi10.1016/S0040-6090(97)00308-8pt_BR
dc.date.available2014-12-16T11:37:03Z
dc.date.available2015-11-26T16:26:03Z-
dc.date.accessioned2014-12-16T11:37:03Z
dc.date.accessioned2015-11-26T16:26:03Z-
dc.description.provenanceMade available in DSpace on 2014-12-16T11:37:03Z (GMT). No. of bitstreams: 1 WOSA1997XV58200023.pdf: 712121 bytes, checksum: 99be0e1b6796cadd622592097d986bff (MD5) Previous issue date: 1997en
dc.description.provenanceMade available in DSpace on 2015-11-26T16:26:03Z (GMT). No. of bitstreams: 2 WOSA1997XV58200023.pdf: 712121 bytes, checksum: 99be0e1b6796cadd622592097d986bff (MD5) WOSA1997XV58200023.pdf.txt: 31339 bytes, checksum: 92aa08fa2d1c785ed591fafa3a9c7244 (MD5) Previous issue date: 1997en
dc.identifier.urihttp://www.repositorio.unicamp.br/jspui/handle/REPOSIP/79667pt_BR
dc.identifier.urihttp://www.repositorio.unicamp.br/handle/REPOSIP/79667
dc.identifier.urihttp://repositorio.unicamp.br/jspui/handle/REPOSIP/79667-
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