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Type: Artigo de periódico
Title: Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD
Author: Durrant, SF
Castro, SGC
BolivarMarinez, LE
Galvao, DS
deMoraes, MAB
Abstract: Fluorinated films were deposited from radiofrequency discharges of toluene/trifluorotoluene and toluene/sulfur hexafluoride mixtures. Actinometric optical emission spectroscopy was used to determine trends in the concentrations of the plasma species H, CH, and F as a function of the partial pressure of trifluorotoluene or sulfur hexafluoride present (expressed as a percentage of the total chamber pressure) designated R-T and R-s, respectively. Transmission infrared spectrophotometry and electron spectroscopy for chemical analysis revealed that the films contain various fluorine-containing functionalities and that the degree of fluorination increases as R-T or R-s is increased. Ultraviolet-visible spectrophotometry of films deposited at various values of R-T and of R-s allowed the determination of the absorption coefficients ct of the films. From plots of ct as a function of photon energy it was possible to calculate the optical gap (E-04). An intriguing result was a decline and subsequent rise in E-04 as R-s was increased. Molecular modelling using ZINDO/PM3 calculations provided a semi-quantitative explanation of the dependence of E-04 on R-s. (C) 1997 Elsevier Science S.A.
Subject: optical properties
optical spectroscopy
plasma processing and deposition
x-ray photoelectron spectroscopy
Country: Suíça
Editor: Elsevier Science Sa Lausanne
Citation: Thin Solid Films. Elsevier Science Sa Lausanne, v. 304, n. 41671, n. 149, n. 156, 1997.
Rights: fechado
Identifier DOI: 10.1016/S0040-6090(97)00308-8
Date Issue: 1997
Appears in Collections:Unicamp - Artigos e Outros Documentos

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