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Type: Artigo de periódico
Title: Structural, surface, and thermomechanical properties of intrinsic and argon implanted tetrahedral amorphous carbon
Author: Motta, EF
Viana, GA
Silva, DS
Cortes, ADS
Freire, FL
Marques, FC
Abstract: The structural, surface, and thermomechanical properties of intrinsic and argon incorporated tetrahedral amorphous carbon films deposited using the filtered cathodic vacuum arc process are reported. Argon atoms were simultaneously incorporated during the deposition of the films using an argon ion gun in the energy range of 0-180 eV. Contact angle measurements revealed that all of the deposited films are hydrophobic, regardless of the substrate bias voltage that was applied during the depositions. Thermal desorption spectroscopy measurements revealed that high argon bombarding energy favors films that are structurally more compact and thermally more stable. An investigation unbinding the mechanism of argon effusion and intrinsic stress relief is presented. (C) 2013 American Vacuum Society. []
Country: EUA
Editor: A V S Amer Inst Physics
Rights: aberto
Identifier DOI: 10.1116/1.4774326
Date Issue: 2013
Appears in Collections:Unicamp - Artigos e Outros Documentos

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