Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/75388
Type: Artigo de periódico
Title: STRUCTURE OF INTERFACES IN A-SI-H/A-SINX-H SUPERLATTICES
Author: SANTOS, PV
HUNDHAUSEN, M
LEY, L
VICZIAN, C
Abstract: We present experimental results on the atomic structure of the interfaces between a-Si: H and a-SiN(x):H layers obtained by analyzing the intensity of the Raman lines from zone-folded acoustic phonons and of the peaks of x-ray diffraction at grazing angles. We determine the width of these interfaces and their stability under thermal annealing in temperatures below the crystallization temperature.
Country: EUA
Editor: Amer Inst Physics
Rights: aberto
Identifier DOI: 10.1063/1.347364
Date Issue: 1991
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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