Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/71914
Type: Artigo de periódico
Title: Some optical properties of amorphous hydrogenated carbon thin films prepared by rf plasma deposition using methane
Author: Alves, MAR
Rossetto, JF
Balachova, O
Braga, ED
Cescato, L
Abstract: Amorphous hydrogenated carbon (a-C:H) films were prepared by plasma enhanced chemical vapor deposition (PECVD) using methane. The optical properties of a-C:H films were investigated by reflectance and transmittance spectrometry in the visible and near-infrared regions. The dependence of refractive index, optical gap, and absorption coefficient are examined as a function of plasma power. (C) 2001 Elsevier Science Ltd. All rights reserved.
Subject: amorphous
PACVD
radio frequency
carbon
refractive index
Country: Inglaterra
Editor: Elsevier Advanced Technology
Rights: fechado
Identifier DOI: 10.1016/S0026-2692(01)00046-5
Date Issue: 2001
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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