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|Type:||Artigo de periódico|
|Title:||Self-organized 2D Ni particles deposited on titanium oxynitride-coated Si sculpted by a low energy ion beam|
|Abstract:||Self-ordered Ni nanoparticles grown on TiNxOy-coated crystalline silicon previously sculpted by ion beam bombardment are reported. The samples are obtained following a sequential in situ routine deposition procedure. First, crystalline Si is Xe+ bombarded, generating regular patterns. Second, a thin TiNxOy film is grown on the patterned Si substrate. Immediately, nano-sized nickel particles are deposited by ion beam sputtering and temperature-annealed forming a 2D lattice. The self-organized Ni islands are induced by preferential Ni site nucleation on the coated sculpted Si grooves.|
ion beam patterning
|Editor:||Iop Publishing Ltd|
|Appears in Collections:||Artigos e Materiais de Revistas Científicas - Unicamp|
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