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Type: Artigo de periódico
Title: Self-organized 2D Ni particles deposited on titanium oxynitride-coated Si sculpted by a low energy ion beam
Author: Morales, M
Merlo, RB
Droppa, R
Alvarez, F
Abstract: Self-ordered Ni nanoparticles grown on TiNxOy-coated crystalline silicon previously sculpted by ion beam bombardment are reported. The samples are obtained following a sequential in situ routine deposition procedure. First, crystalline Si is Xe+ bombarded, generating regular patterns. Second, a thin TiNxOy film is grown on the patterned Si substrate. Immediately, nano-sized nickel particles are deposited by ion beam sputtering and temperature-annealed forming a 2D lattice. The self-organized Ni islands are induced by preferential Ni site nucleation on the coated sculpted Si grooves.
Subject: self-organization
ion beam patterning
Country: Inglaterra
Editor: Iop Publishing Ltd
Rights: fechado
Identifier DOI: 10.1088/0022-3727/47/19/195303
Date Issue: 2014
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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