Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/69546
Type: Artigo de periódico
Title: OPTICAL MONITORING OF THE ENDPOINT IN THIN-FILM PLASMA-ETCHING
Author: BRAGA, ES
MENDES, GF
FREJLICH, J
MAMMANA, AP
Country: Suíça
Editor: Elsevier Science Sa Lausanne
Rights: fechado
Identifier DOI: 10.1016/0040-6090(83)90189-X
Date Issue: 1983
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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