Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/68443
Type: Artigo de periódico
Title: GRATINGS FOR METROLOGY AND PROCESS-CONTROL .2. THIN-FILM THICKNESS MEASUREMENT
Author: MENDES, GF
CESCATO, L
FREJLICH, J
Editor: Optical Soc Amer
Rights: aberto
Date Issue: 1984
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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