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Type: Artigo de periódico
Title: Fabrication of dielectric hollow submicrometric pipes
Author: Soares, LL
Cescato, L
Cruz, NC
de Moraes, MB
Abstract: A simple technique to obtain an array of hollow submicrometric titanium oxide pipes is described. Initially, a submicrometric structure is formed in a positive photoresist by holographic exposure, followed by the deposition of the titanium oxide film and the removal of the photoresist by an appropriate solvent. These structures may be useful as waveguides for x-ray and neutron capillary optics. (C) 2000 American Vacuum Society. [S0734-211X(00)02202-2].
Country: EUA
Editor: Amer Inst Physics
Citation: Journal Of Vacuum Science & Technology B. Amer Inst Physics, v. 18, n. 2, n. 713, n. 716, 2000.
Rights: aberto
Identifier DOI: 10.1116/1.591264
Date Issue: 2000
Appears in Collections:Unicamp - Artigos e Outros Documentos

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