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Type: Artigo de periódico
Title: Evidence of Be3P2 formation during growth of Be-doped phosphorus-based semiconductor compounds
Author: de Carvalho, MMG
Betinni, J
Pudenzi, MAA
Cardoso, LP
Cotta, MA
Abstract: In this work, we present evidence that Be3P2 microcrystals are formed in Be-doped phosphorus-based semiconductor compounds grown by chemical beam epitaxy. Our results suggest that microcrystal formation occurs when high Be concentrations (> 10(18) cm(-3)) and temperatures higher than 500 degrees C are used for crystal growth. The main consequence of Be3P2 formation is a high phosphorus consumption close to these microcrystals that causes a large density of P vacancies in the semiconductor layer. This results in reduced electrical mobility, lattice parameter reduction, and poor crystalinity of the film in general. (c) 1999 American Institute of Physics. [S0003-6951(99)01624-1].
Country: EUA
Editor: Amer Inst Physics
Citation: Applied Physics Letters. Amer Inst Physics, v. 74, n. 24, n. 3669, n. 3671, 1999.
Rights: aberto
Identifier DOI: 10.1063/1.123216
Date Issue: 1999
Appears in Collections:Unicamp - Artigos e Outros Documentos

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