Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/65641
Type: Artigo de periódico
Title: ESTIMATION OF INDIUM-TO-GERMANIUM AND GALLIUM-TO-GERMANIUM SPUTTERING YIELD RATIOS USING COSPUTTERING DEPOSITION
Author: COMEDI, D
FAJARDO, F
CHAMBOULEYRON, I
TABACNIKS, M
Editor: Amer Inst Physics
Rights: aberto
Identifier DOI: 10.1116/1.579229
Date Issue: 1994
Appears in Collections:Unicamp - Artigos e Outros Documentos

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