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Type: Artigo de periódico
Title: Electrical properties of diamond films prepared from carbon disulfide and ethanol in hydrogen
Author: Sampaio, MA
Peterlevitz, AC
Ceragioli, HJ
Correa, WLA
Damiani, F
Chiquito, AJ
Diagonel, E
Baranauskas, V
Abstract: Sulfur doping of diamond samples produced by the hot-filament chemical vapor deposition (CVD) process using carbon disulfide highly diluted in ethanol and hydrogen has been investigated. The polycrystalline morphology observed by Scanning Electron Microscopy (SEM) and the characteristic diamond Raman peak were practically not affected by addition of CS(2) in the range of 0.8-2.0% by volume. The electrical resistivity dependence due to CS(2) addition showed a "down-and-up" curve with minimum resistivity of about 3.6 x 10(-4) Omega cm. Hall mobility as high as 325.9 cm(2)V(-1)s(-1) have been achieved. PIXE and XRF measurements showed that sulfur (100-400 ppm) was incorporated during the deposition independent of the CS(2) added. Unintentional contaminations with Si, W, Cu and Cr have been detected. All the samples, measured by hot-point method and Hall effect, showed p-type characteristics. (C) 2010 Elsevier Ltd. All rights reserved.
Subject: Sulfur doped diamond
Carbon disulfide
Doped CVD-diamond
p-type diamond
Country: Inglaterra
Editor: Pergamon-elsevier Science Ltd
Citation: Vacuum. Pergamon-elsevier Science Ltd, v. 85, n. 2, n. 180, n. 183, 2010.
Rights: fechado
Identifier DOI: 10.1016/j.vacuum.2010.05.009
Date Issue: 2010
Appears in Collections:Unicamp - Artigos e Outros Documentos

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