Nanoscale lateral switchable rectifiers fabricated by local anodic oxidation

Abstract

Scanning probe lithography as a mean to pattern, implement, and discover new devices in different materials systems provides an elevated degree of flexibility, permitting one to tailor device geometries and structures at will, in particular by virtue of modification of the local chemistry. Here we define metal-insulator-metal junctions exhibiting a switchable rectifier behavior by patterning titanium channels through local anodic oxidation techniques. The nanoscale TiO(2) junctions thus formed exhibit IV characteristics with non-volatile switchable rectification and memristive behavior due to ionic motion through the metal-semiconductor interfaces. VC 2011 American Institute of Physics. [doi:10.1063/1.3609065]