Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/62852
Type: Artigo de periódico
Title: Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Author: Archanjo, BS
Siles, PF
Oliveira, CKBQM
Baptista, DL
Neves, BRA
Abstract: This work reports on nanoscale and microscale metal oxide gas sensors, consisting of metal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinct metal oxides, molybdenum and titanium oxides, were tested at different temperatures using CO2 and H-2 as test gases. Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied. Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range. Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3 and TiO2-x.
Country: EUA
Editor: Hindawi Publishing Corporation
Rights: aberto
Identifier DOI: 10.1155/2013/898565
Date Issue: 2013
Appears in Collections:Unicamp - Artigos e Outros Documentos

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