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Type: Artigo de periódico
Title: Observation of the Berreman effect in infrared reflection-absorption spectra of amorphous titanium oxide thin films deposited on aluminum
Author: Trasferetti, BC
Davanzo, CU
Da Cruz, NC
De Moraes, MAB
Abstract: Infrared reflection-absorption spectra of plasma-enhanced chemical vapor deposition (PECVD) amorphous TiO2 thin films on aluminum were obtained with s- and p-polarized light and oblique incidence angles. such spectra were analyzed by means of spectral simulations based on a Fresnel equation for a three-layered system. The optical constants used in the simulations were obtained through the Kramers-Kronig analysis of the reflectance spectra of a pellet of powdered amorphous TiO2. LO-TO energy-loss functions were also calculated from these optical constants, and a splitting was observed. A good qualitative agreement between experimental and simulated spectra was achieved, and the Berreman effect was observed in both cases when p-polarized light was used, It was shown, therefore, that the Berreman effect makes infrared reflection-absorption spectroscopy a successful technique for the characterization of an amorphous TiO2 thin layer on aluminum.
Subject: infrared reflection-absorption spectroscopy
Berreman effect
LO-TO splitting
amorphous TiO2 thin films
plasma enhanced chemical vapor deposition
Country: EUA
Editor: Soc Applied Spectroscopy
Rights: aberto
Identifier DOI: 10.1366/0003702001949933
Date Issue: 2000
Appears in Collections:Unicamp - Artigos e Outros Documentos

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