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Type: Artigo de periódico
Title: Determination of thickness and optical constants of amorphous silicon films from transmittance data
Author: Mulato, M
Chambouleyron, I
Birgin, EG
Martinez, JM
Abstract: This work presents the application of a recently developed numerical method to determine the thickness and the optical constants of thin films using experimental transmittance data only. This method may be applied to films not displaying a fringe pattern and is shown to work for a-Si:H (hydrogenated amorphous silicon) layers as thin as 100 nm. The performance and limitations of the method are discussed on the basis of experiments performed on a series of six a-Si:H samples grown under identical conditions, but with thickness varying from 98 nm to 1.2 mu m. (C) 2000 American Institute of Physics. [S0003-6951(00)02540-7].
Country: EUA
Editor: Amer Inst Physics
Rights: aberto
Identifier DOI: 10.1063/1.1314299
Date Issue: 2000
Appears in Collections:Unicamp - Artigos e Outros Documentos

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