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Type: Artigo de periódico
Title: Design and modeling of an acoustically excited double-paddle scanner
Author: Ahmida, KM
Ferreira, LOS
Abstract: Dynamic analysis is an essential factor in the design, fabrication and optimization of micro-systems. Micro-scanners are currently subjected to wide research work. In this paper, the dynamic behavior of a monolithic single-crystal silicon microstructure is investigated. The microstructure used is a double-paddle scanning mirror for laser applications. It consists of two similar plates (wings) connected to another plate (mirror) and is suspended by one torsion bar. The dynamic analysis is conducted numerically, using finite element analysis. The numerical modeling is described. The numerical results are validated experimentally by measuring the frequency response functions collected at some points on the scanner surface. The experimental modal analysis is performed using a laser Doppler vibrometer and an acoustic excitation device. The excitation device consists of a polyester resin mount with two conic-shaped ducts which give access to the back of the two wings from one side and to two mini loudspeakers on the other side. This excitation device was used and good agreement was found between the numerically predicted and the experimentally identified modal parameters. The non-intrusive excitation mechanism and the optical measurement techniques used in the experiments are discussed. A high quality factor is identified for the chosen operational mode shape.
Country: Inglaterra
Editor: Iop Publishing Ltd
Rights: fechado
Identifier DOI: 10.1088/0960-1317/14/10/007
Date Issue: 2004
Appears in Collections:Unicamp - Artigos e Outros Documentos

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