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Type: Artigo de periódico
Title: Lattice strain distribution resolved by X-ray Bragg-surface diffraction in an Si matrix distorted by embedded FeSi2 nanoparticles
Author: Lang, R
de Menezes, AS
dos Santos, AO
Reboh, S
Meneses, EA
Amaral, L
Cardoso, LP
Abstract: Out-of-plane and primarily in-plane lattice strain distributions, along the two perpendicular crystallographic directions on the subsurface of a silicon layer with embedded FeSi2 nanoparticles, were analyzed and resolved as a function of the synchrotron X-ray beam energy by using omega:phi mappings of the (111) and (111) Bragg-surface diffraction peaks. The nanoparticles, synthesized by ion-beam-induced epitaxial crystallization of Fe+-implanted Si(001), were observed to have different orientations and morphologies (sphere-and plate-like nanoparticles) within the implanted/recrystallized region. The results show that the shape of the synthesized material singularly affects the surrounding Si lattice. The lattice strain distribution elucidated by the nonconventional X-ray Bragg-surface diffraction technique clearly exhibits an anisotropic effect, predominantly caused by plate-shaped nanoparticles. This type of refined detection reflects a key application of the method, which could be used to allow discrimination of strains in distorted semiconductor substrate layers.
Country: EUA
Editor: Wiley-blackwell
Rights: aberto
Identifier DOI: 10.1107/S0021889813026046
Date Issue: 2013
Appears in Collections:Unicamp - Artigos e Outros Documentos

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