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Type: Artigo de periódico
Title: IonRock: software for solving strain gradients of ion-implanted semiconductors by X-ray diffraction measurements and evolutionary programming
Author: Bleicher, L
Sasaki, JM
Orloski, RV
Cardoso, LP
Hayashi, MA
Swart, JW
Abstract: We present a program that uses an optimization algorithm to fit rocking curves of ion-implanted semiconductors. This is an inverse problem that cannot be solved by simple methods. However, using recursion formulae for rocking curve calculations and a model of ion distribution after implantation, it is possible to fit experimental data with a general-purpose optimization method. In our case, we use a modified version of the genetic algorithm, which has been shown to be a good technique for this problem. The program also calculates rocking curves for a given ion profile, such as those generated by ion implantation simulation programs. (C) 2004 Elsevier B.V. All rights reserved.
Subject: X-ray diffraction
ion implantation
genetic algorithms
Country: Holanda
Editor: Elsevier Science Bv
Citation: Computer Physics Communications. Elsevier Science Bv, v. 160, n. 2, n. 158, n. 165, 2004.
Rights: fechado
Identifier DOI: 10.1016/j.cpc.2004.02.015
Date Issue: 2004
Appears in Collections:Unicamp - Artigos e Outros Documentos

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