Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/59914
Type: Artigo de periódico
Title: PLASMA-ETCHED DEPTH MEASUREMENT OF FILMS USING THE DIFFRACTION OF A LAMELLAR GRATING
Author: MENDES, GF
CESCATO, L
FREJLICH, J
BRAGA, ES
MAMMANA, AP
Country: Suíça
Editor: Elsevier Science Sa Lausanne
Rights: fechado
Identifier DOI: 10.1016/0040-6090(84)90083-X
Date Issue: 1984
Appears in Collections:Unicamp - Artigos e Outros Documentos

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