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Type: Artigo de periódico
Title: Thin film deposition from plasmas of tetramethylsilane-helium-argon mixtures with oxygen and with nitrogen
Author: Da Cruz, NC
Durrant, SF
De Moraes, MAB
Abstract: Films were produced by plasma enhanced chemical vapor deposition (PECVD) of tetramethylsilane (TMS) -helium-argon mixtures with either oxygen or nitrogen in a vacuum system fed with radiofrequency power. Actinometric optical emission spectroscopy was used to determine trends in the concentrations of plasma species of interest (H, CH, O, CO, and CN) as a function of the ratio of the inorganic reactive gas (oxygen or nitrogen) to the monomer (TMS) in the system feed. As the ratio of oxygen to TMS in the feed is increased, the degree of oxygenation of the deposited material, as revealed by transmission infrared spectroscopy, is also increased. Similarly, the degree of nitrogenation of the films increases with increasing nitrogen to monomer ratio in the feed. Strong correlations exist between the plasma concentrations of the above-mentioned plasma species and film structure and composition. (C) 1998 John Wiley & Sons, Inc.
Subject: plasma-enhanced chemical vapor deposition
actinometric optical emission spectroscopy
Country: EUA
Editor: John Wiley & Sons Inc
Rights: fechado
Identifier DOI: 10.1002/(SICI)1099-0488(199808)36:11<1873
Date Issue: 1998
Appears in Collections:Unicamp - Artigos e Outros Documentos

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