Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/56927
Type: Artigo de periódico
Title: MICROVOIDS IN DIAMOND-LIKE AMORPHOUS-SILICON CARBIDE
Author: CARRENO, MNP
PEREYRA, I
FANTINI, MCA
TAKAHASHI, H
LANDERS, R
Abstract: The correlation between composition, microstructure, and optical properties of a-Si1-xCx:H thin films with different stoichiometries was established. The alloys were deposited by radio frequency glow discharge under ''starving'' plasma conditions from mixtures of SiH4 and CH4. The samples were characterized by small angle x-ray scattering, ultraviolet-visible and infrared spectrometry, and Auger electron spectroscopy. The results showed the presence of microvoids with sizes between similar or equal to 3 Angstrom and similar or equal to 8 Angstrom. The relative microvoid volume fraction displayed a maximum for x around 55 at. % and decreased for higher values of x. High carbon content alloys (x similar or equal to 70 at. %) not only have a lower relative microvoid volume fraction, but show optical gaps as high as 3.7 eV, high resistivity, and very low refractive index, indicating the presence of a diamond-like C-C structure. These remarkable results are attributed to the deposition under ''starving'' plasma conditions.
Editor: Amer Inst Physics
Rights: aberto
Date Issue: 1994
Appears in Collections:Unicamp - Artigos e Outros Documentos

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