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Type: Artigo de periódico
Title: Amorphous oxygen-containing hydrogenated carbon films formed by plasma enhanced chemical vapor deposition
Author: Durrant, SF
Castro, SG
Cisneros, JI
daCruz, NC
deMoraes, MAB
Abstract: Films were deposited from glow discharge plasmas of acetylene-oxygen-argon mixtures in a deposition system fed with radio frequency power. The principal variable was the proportion of oxygen in the gas feed, X(ox). The chemical structure and elemental composition of the films were investigated by transmission infrared spectrophotometry and x-ray photoelectron spectroscopy. Optical properties-refractive index, absorption coefficient, and optical gap-were determined from transmission ultraviolet-visible spectroscopy data. The latter also allowed the determination of film thicknesses and hence deposition rates. It was found that the oxygen content of the films and, within limits, the refractive index are controllable by the selection of X(ox). (C) 1996 American Vacuum Society.
Editor: Amer Inst Physics
Rights: aberto
Identifier DOI: 10.1116/1.579906
Date Issue: 1996
Appears in Collections:Artigos e Materiais de Revistas Científicas - Unicamp

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