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Type: Artigo
Title: Sacrificial adhesive bonding: a powerful method for fabrication of glass microchips
Author: Lima, Renato S.
Leao, Paulo A. G. C.
Piazzetta, Maria H. O.
Monteiro, Alessandra M.
Shiroma, Leandro Y.
Gobbi, Angelo L.
Carrilho, Emanuel
Abstract: A new protocol for fabrication of glass microchips is addressed in this research paper. Initially, the method involves the use of an uncured SU-8 intermediate to seal two glass slides irreversibly as in conventional adhesive bonding-based approaches. Subsequently, an additional step removes the adhesive layer from the channels. This step relies on a selective development to remove the SU-8 only inside the microchannel, generating glass-like surface properties as demonstrated by specific tests. Named sacrificial adhesive layer (SAB), the protocol meets the requirements of an ideal microfabrication technique such as throughput, relatively low cost, feasibility for ultra largescale integration (ULSI), and high adhesion strength, supporting pressures on the order of 5 MPa. Furthermore, SAB eliminates the use of high temperature, pressure, or potential, enabling the deposition of thin films for electrical or electrochemical experiments. Finally, the SAB protocol is an improvement on SU-8-based bondings described in the literature. Aspects such as substrate/resist adherence, formation of bubbles, and thermal stress were effectively solved by using simple and inexpensive alternatives
Subject: Baixas temperaturas
Country: Reino Unido
Editor: Springer
Rights: Aberto
Identifier DOI: 10.1038/srep13276
Date Issue: 2015
Appears in Collections:IQ - Artigos e Outros Documentos

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