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Type: Artigo
Title: Silicon nanomembranes with hybrid crystal orientations and strain states
Author: Scott, Shelley A.
Deneke, Christoph
Paskiewicz, Deborah M.
Ryu, Hyuk Ju
Malachias, Angelo
Baunack, Stefan
Schmidt, Oliver G.
Savage, Donald E.
Eriksson, Mark A.
Lagally, Max G.
Abstract: Methods to integrate different crystal orientations, strain states, and compositions of semiconductors in planar and preferably flexible configurations may enable nontraditional sensing-, stimulating-, or communication-device applications. We combine crystalline-silicon nanomembranes, patterning, membrane transfer, and epitaxial growth to demonstrate planar arrays of different orientations and strain states of Si in a single membrane, which is then readily transferable to other substrates, including flexible supports. As examples, regions of Si(001) and Si(110) or strained Si(110) are combined to form a multicomponent, single substrate with high-quality narrow interfaces. We perform extensive structural characterization of all interfaces and measure charge-carrier mobilities in different regions of a 2D quilt. The method is readily extendable to include varying compositions or different classes of materials.
Subject: Epitaxia
Interfaces (Ciências físicas)
Interfaces (Physical sciences)
Country: Estados Unidos
Editor: American Chemical Society
Rights: fechado
Identifier DOI: 10.1021/acsami.7b14291
Date Issue: 2017
Appears in Collections:IFGW - Artigos e Outros Documentos

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