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|Title:||Silicon nanomembranes with hybrid crystal orientations and strain states|
|Author:||Scott, Shelley A.|
Paskiewicz, Deborah M.
Ryu, Hyuk Ju
Schmidt, Oliver G.
Savage, Donald E.
Eriksson, Mark A.
Lagally, Max G.
|Abstract:||Methods to integrate different crystal orientations, strain states, and compositions of semiconductors in planar and preferably flexible configurations may enable nontraditional sensing-, stimulating-, or communication-device applications. We combine crystalline-silicon nanomembranes, patterning, membrane transfer, and epitaxial growth to demonstrate planar arrays of different orientations and strain states of Si in a single membrane, which is then readily transferable to other substrates, including flexible supports. As examples, regions of Si(001) and Si(110) or strained Si(110) are combined to form a multicomponent, single substrate with high-quality narrow interfaces. We perform extensive structural characterization of all interfaces and measure charge-carrier mobilities in different regions of a 2D quilt. The method is readily extendable to include varying compositions or different classes of materials.|
Interfaces (Ciências físicas)
Interfaces (Physical sciences)
|Editor:||American Chemical Society|
|Appears in Collections:||IFGW - Artigos e Outros Documentos|
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