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Type: Artigo
Title: Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma
Author: Schianti, Juliana de Novais
Nascimento, Fellype do
Ramirez, Jhonattan Cordoba
Machida, Munemasa
Gabrielli, Lucas Heitzmann
Hernandez-Figueroa, Hugo Enrique
Moshkalev, Stanislav
Abstract: Dielectric barrier discharge (DBD) plasma was used to change the wettability of a SU-8 photoresist, reducing the contact angle and improving the surface smoothness. As most polymers, SU-8 has hydrophobic surfaces which prevents the adhesion of biological samples when used to fabricate biochemical sensors. Here, DBD Plasma treatment was conducted over the SU-8 surface, reducing the contact angle from 78 degrees to 12 degrees. The advantage of this treatment is that the SU-8 surface maintains the hydrophilic surface behavior over 24 h time period. DBD plasma modified the SU-8 surface wettability under low temperature variation and does not cause great irregularities on the surface. The highest value of root mean square surface roughness after 10min exposure was 2.9 +/- 0.3 nm.
Subject: Dielétricos
Pressão atmosférica
Country: Estados Unidos
Editor: AIP Publishing
Rights: fechado
Identifier DOI: 10.1116/1.4999045
Date Issue: 2018
Appears in Collections:IFGW - Artigos e Outros Documentos
FEEC - Artigos e Outros Documentos

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