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Type: Artigo
Title: Influence Of Substrate Pre-treatments By Xe+ Ion Bombardment And Plasma Nitriding On The Behavior Of Tin Coatings Deposited By Plasma Reactive Sputtering On 100cr6 Steel
Author: Vales
S.; Brito
P.; Pineda
F. A. G.; Ochoa
E. A.; Droppa
Jr.; Garcia
J.; Morales
M.; Alvarez
F.; Pinto
Abstract: In this paper the influence of pre-treating a 100Cr6 steel surface by Xe+ ion bombardment and plasma nitriding at low temperature (380 degrees C) on the roughness, wear resistance and residual stresses of thin TiN coatings deposited by reactive IBAD was investigated. The Xe+ ion bombardment was carried out using a 1.0 keV kinetic energy by a broad ion beam assistance deposition (IBAD, Kaufman cell). The results showed that in the studied experimental conditions the ion bombardment intensifies nitrogen diffusion by creating lattice imperfections, stress, and increasing roughness. In case of the combined pre-treatment with Xe+ ion bombardment and subsequent plasma nitriding, the samples evolved relatively high average roughness and the wear volume increased in comparison to the substrates exposed to only nitriding or ion bombardment. (C) 2016 Elsevier B.V. All rights reserved.
Subject: Ion Implantation
Ion Beam-assisted Deposition
Editor: Elsevier Science SA
Rights: fechado
Identifier DOI: 10.1016/j.matchemphys.2016.04.010
Date Issue: 2016
Appears in Collections:Unicamp - Artigos e Outros Documentos

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