Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/25658
Type: Artigo de periódico
Title: Sample preparation method for scanning force microscopy
Author: Jankov, I.R.
Szente, R.N.
Goldman, I.D.
Carreño, M.N.P.
Swart, J.W.
Landers, R.
Abstract: We present a method of sample preparation for studies of ion implantation on metal surfaces. The method, employing a mechanical mask, is specially adapted for samples analysed by Scanning Force Microscopy. It was successfully tested on polycrystallyne copper substrates implanted with phosphorus ions at an acceleration voltage of 39keV. The changes of the electrical properties of the surface were measured by Kelvin Probe Force Microscopy and the surface composition was analysed by Auger Electron Spectroscopy.
Editor: Sociedade Brasileira de Física
Rights: aberto
Identifier DOI: 10.1590/S0103-97332001000400005
Address: http://dx.doi.org/10.1590/S0103-97332001000400005
http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332001000400005
Date Issue: 1-Dec-2001
Appears in Collections:Unicamp - Artigos e Outros Documentos

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