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Type: Artigo de periódico
Title: Environment of Er in a-Si:H: co-sputtering versus ion implantation
Author: Piamonteze, Cínthia
Tessler, Leandro R.
Alves, M. C. Martins
Tolentino, H.
Abstract: We report a comparative Extended X-Ray Fine Structure (EXAFS) study of Er in a-Si:H prepared by Er implantation in a-Si:H and by co-sputtering undergoing the same cumulative annealing processes. It was found that the Er environment in as-implanted samples is formed by Si atoms, which are replaced by oxygen under annealing. In the co-sputtered samples, the initial low coordination oxygen environment evolves under thermal treatment to an Er2O3 -like neighborhood.
Editor: Sociedade Brasileira de Física
Rights: aberto
Identifier DOI: 10.1590/S0103-97331999000400029
Date Issue: 1-Dec-1999
Appears in Collections:Unicamp - Artigos e Outros Documentos

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