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Type: Artigo de periódico
Title: Micro-reactors For Characterization Of Nanostructure-based Sensors.
Author: Savu, R
Silveira, J V
Flacker, A
Vaz, A R
Joanni, E
Pinto, A C
Gobbi, A L
Santos, T E A
Rotondaro, A L P
Moshkalev, S A
Abstract: Fabrication and testing of micro-reactors for the characterization of nanosensors is presented in this work. The reactors have a small volume (100 μl) and are equipped with gas input/output channels. They were machined from a single piece of kovar in order to avoid leaks in the system due to additional welding. The contact pins were electrically insulated from the body of the reactor using a borosilicate sealing glass and the reactor was hermetically sealed using a lid and an elastomeric o-ring. One of the advantages of the reactor lies in its simple assembly and ease of use with any vacuum/gas system, allowing the connection of more than one device. Moreover, the lid can be modified in order to fit a window for in situ optical characterization. In order to prove its versatility, carbon nanotube-based sensors were tested using this micro-reactor. The devices were fabricated by depositing carbon nanotubes over 1 μm thick gold electrodes patterned onto Si/SiO(2) substrates. The sensors were tested using oxygen and nitrogen atmospheres, in the pressure range between 10(-5) and 10(-1) mbar. The small chamber volume allowed the measurement of fast sensor characteristic times, with the sensors showing good sensitivity towards gas and pressure as well as high reproducibility.
Citation: The Review Of Scientific Instruments. v. 83, n. 5, p. 055104, 2012-May.
Rights: aberto
Identifier DOI: 10.1063/1.4709495
Date Issue: 2012
Appears in Collections:Unicamp - Artigos e Outros Documentos

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