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Type: Artigo de evento
Title: A Method To Synthesize Sio2-tio2 Glasses Based On The Synergy Between Vad And Ald Techniques: Study Of Tio2doping Profile Along Radial Direction
Author: Manfrim T.P.
Ono E.
Fujiwara E.
Santos M.F.M.
Boery M.N.O.
Santos J.S.
Pizani P.S.
Suzuki C.K.
Abstract: This study aimed the synthesis of titania-doped silica glasses with controlled TiO2 concentrations and distribution profiles through the synergy between Vapor-Phase Axial Deposition (VAD) and Atomic Layer Deposition (ALD) techniques. In a first stage, porous boules of pure silica were synthesized by the VAD technique. Afterwards, these boules were submitted to a cyclic doping process with TiCl4 vapor and H2O vapor using the principles of ALD technique. Silica-titania on glassy state was obtained after the consolidation of the porous boule at 1400 °C. The effects of VAD and ALD parameters were studied on the radial doping profile homogeneity and glass structure in the consolidated material. Concerning to the radial profile, a more homogeneous glass was obtained for porous boules doped at 90 °C and with higher average density. This temperature was enough to suppress the effect of TiCl4 condensation on the porous boule surface even for a long TiCl4 flow time, providing a relatively high doping homogeneity for one and four ALD cycles. The opacity in some consolidated samples was attributed to a segregated phase, which could be completely eliminated by a second heat treatment in flame. © 2011 Elsevier B.V. All rights reserved.
Rights: fechado
Identifier DOI: 10.1016/j.optmat.2011.03.036
Date Issue: 2011
Appears in Collections:Unicamp - Artigos e Outros Documentos

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