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Type: Artigo de evento
Title: Fabrication Of Stampers For Molding Polymeric Sieves Using Optical And Holographic Lithography
Author: Gutierrez-Rivera L.E.
Cescato L.
Abstract: Polymeric sieves are important devices for biological applications. Such sieves can be produced by casting a stamper (or master). In this paper we develop two different processes for fabrication of PDMS stampers using optical and holographic lithography. The first process starts with the recording of an array of holes in a negative photoresist (SU-8). The PDMS stamper is then obtained through the direct casting of PDMS (Polydimethylsiloxane) on the SU-8 strucutres. The second process starts with the recording of an array of pillars in a positive AZ photoresists. A negative mold of the photoresist structures is electroformed in nickel. The resulting negative nickel mold, composed of an array of holes, is then used for casting of the PDMS stamper. The resolution obtained is enough to generate arrays of pillars with diameters so small as 200nm. © 2008 American Institute of Physics.
Rights: aberto
Identifier DOI: 10.1063/1.2926883
Date Issue: 2008
Appears in Collections:Unicamp - Artigos e Outros Documentos

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