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Type: Artigo de evento
Title: Plasma Diagnostics In An Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell
Author: Daltrini A.M.
Moshkalev S.A.
Morgan T.J.
Piejak R.B.
Graham W.G.
Abstract: An Inductively Coupled Plasma - Gaseous Electronics Conference reference cell was studied by different diagnostics: laser induced fluorescence, Langmuir probe, optical emission spectroscopy (Ar line ratios) and coil electrical measurements. Two modes of operation (high and low density plasma) were analyzed. A hysteresis in the transition between modes is identified only when the applied power is considered. When the plasma power is considered (coil losses are subtracted), the plasma parameters showed a smooth behavior between the two modes. The comparison of the plasma parameters obtained by different diagnostics showed a good agreement, revealing differences in the electron energy distribution function and the usefulness of Ar line ratio method. © The Electrochemical Society.
Rights: fechado
Identifier DOI: 10.1149/1.2956051
Date Issue: 2008
Appears in Collections:Unicamp - Artigos e Outros Documentos

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