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|Type:||Artigo de evento|
|Title:||Fabrication Of Multi-point Test Structures Using Focused Ion Beam And Selective Carbon Nanotubes Deposition By Dielectrophoresis|
|Author:||Da Silva M.M.|
|Abstract:||In this work, we present experimental procedures developed for fabrication of multi-point test structures using focused ion beam. The test structure is fabricated in two steps: (i) metal (Au, Pd) electrodes are fabricated by lift-off technique. (ii) nanocontacts are fabricated by ion beam induced deposition of platinum and milling with Ga ion beam. The multi-wall nanotubes (MWNT) are deposited by dielectrophoresis method between metal electrodes. Our test structure allows measurements using 2 and 4 terminals methods. © The Electrochemical Society.|
|Appears in Collections:||Unicamp - Artigos e Outros Documentos|
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