Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/105581
Type: Artigo de evento
Title: Fabrication Of Multi-point Test Structures Using Focused Ion Beam And Selective Carbon Nanotubes Deposition By Dielectrophoresis
Author: Da Silva M.M.
Vaz A.R.
Verissimo C.
Moshkalev S.A.
Swart J.W.
Abstract: In this work, we present experimental procedures developed for fabrication of multi-point test structures using focused ion beam. The test structure is fabricated in two steps: (i) metal (Au, Pd) electrodes are fabricated by lift-off technique. (ii) nanocontacts are fabricated by ion beam induced deposition of platinum and milling with Ga ion beam. The multi-wall nanotubes (MWNT) are deposited by dielectrophoresis method between metal electrodes. Our test structure allows measurements using 2 and 4 terminals methods. © The Electrochemical Society.
Editor: 
Rights: fechado
Identifier DOI: 10.1149/1.2956063
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-57749187076&partnerID=40&md5=2565467df166a3eaac32619970a8a1dd
Date Issue: 2008
Appears in Collections:Unicamp - Artigos e Outros Documentos

Files in This Item:
There are no files associated with this item.


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.