Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/103970
Type: Artigo de evento
Title: Comparison Of Plasma Parameters Obtained With Planar Probe And Optical Spectrometer
Author: Swart L.
Daltrini A.M.
Moshkalyov S.A.
Verdonck P.
Abstract: A planar probe and an optical spectrometer were employed to analyze some parameters in an inductively coupled plasma (ICP). The analyses were performed in Ar, Ar+SF6 and O2 plasmas at 40 mTorr. Typical probe results indicate an ion current of 10-3 A/cm2 and an electron temperature (high energy tail) between 1-2 eV in measurements at high powers. At low powers a distinct discharge regime is observed, typically with low density (low ion current) and high electron temperature. Even though a quantitative analysis has not been done yet, the optical emission studies also showed the presence of these two regimes. © 2006 The Electrochemical Society.
Editor: 
Rights: fechado
Identifier DOI: 
Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-33847632422&partnerID=40&md5=3b63d75bf7b62a26f7cc5b0556e0c118
Date Issue: 2006
Appears in Collections:Unicamp - Artigos e Outros Documentos

Files in This Item:
There are no files associated with this item.


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.