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|Type:||Artigo de evento|
|Title:||Study Of Mode Transitions In Inductively Coupled Plasmas|
|Abstract:||The transitions between low density and high density modes in an inductively coupled plasma reactor were studied by the measurements of different spectral line emissions in Ar plasmas. A described model for metastable atoms shows that the ratio of the emissions Ar 811.5 nm / Ar 750.4 nm is similar to the contribution of metastable ionization in electron production (two-step ionization). Then, the influence of the metastable atoms in the transition triggering was identified, mainly at high pressures. Also, the measurements show that metastable atoms can be a source for the sustaining of the H mode in the hysteresis region. © 2006 The Electrochemical Society.|
|Appears in Collections:||Unicamp - Artigos e Outros Documentos|
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