Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/103960
Type: Artigo de evento
Title: Study Of Mode Transitions In Inductively Coupled Plasmas
Author: Daltrini A.M.
Moshkalyov S.A.
Monteiro M.J.R.
Machida M.
Besseler E.
Abstract: The transitions between low density and high density modes in an inductively coupled plasma reactor were studied by the measurements of different spectral line emissions in Ar plasmas. A described model for metastable atoms shows that the ratio of the emissions Ar 811.5 nm / Ar 750.4 nm is similar to the contribution of metastable ionization in electron production (two-step ionization). Then, the influence of the metastable atoms in the transition triggering was identified, mainly at high pressures. Also, the measurements show that metastable atoms can be a source for the sustaining of the H mode in the hysteresis region. © 2006 The Electrochemical Society.
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Rights: fechado
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Address: http://www.scopus.com/inward/record.url?eid=2-s2.0-33847618230&partnerID=40&md5=1a0cf5d08c544a1eb4b09fa3e54242a1
Date Issue: 2006
Appears in Collections:Unicamp - Artigos e Outros Documentos

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